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IntelLLVM: Enable Fortran module rebuild avoidance in Makefile generators

Brad King requested to merge brad.king/cmake:IntelLLVM-Fortran-copy-mod into master

The Makefile generators use an internal cmake -E cmake_copy_f90_mod tool to avoid rebuilding module consumers when the .mod content changes only in a trivial way (e.g. the time it was built). This is done with logic specific to each vendor's module file format. Enable the "Intel" format support when using the IntelLLVM compiler (ifx) too.

Issue: #22922
Backport: release

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